Search results for "Reactive magnetron"

showing 2 items of 2 documents

Optical Plasma Diagnostics During Reactive Magnetron Sputtering

2008

Reactive magnetronMaterials science[SPI] Engineering Sciences [physics]Sputteringbusiness.industryOptoelectronicsPlasma diagnosticsOptical emission spectroscopyHigh-power impulse magnetron sputteringbusinessGlow discharge mass spectroscopy
researchProduct

Amorphous p-Type Conducting Zn-x Ir Oxide (x > 0.13) Thin Films Deposited by Reactive Magnetron Cosputtering

2021

Zinc-iridium oxide (Zn-Ir-O) thin films have been demonstrated as a p-type conducting material. However, the stability of p-type conductivity with respect to chemical composition or temperature is still unclear. In this study we discuss the local atomic structure and the electrical properties of Zn-Ir-O films in the large Ir concentration range. The films are deposited by reactive DC magnetron co-sputtering at two different substrate temperatures-without intentional heating and at 300 {\deg}C. Extended X-ray absorption fine structure (EXAFS) analysis reveals that strongly disordered ZnO4 tetrahedra are the main Zn complexes in Zn-Ir-O films with up to 67.4 at% Ir. As the Ir concentration in…

X-ray absorption spectroscopyReactive magnetronCondensed Matter - Materials ScienceMaterials scienceOxideAnalytical chemistryMaterials Science (cond-mat.mtrl-sci)FOS: Physical sciencesPhysics - Applied PhysicsApplied Physics (physics.app-ph)Condensed Matter PhysicsElectronic Optical and Magnetic MaterialsAmorphous solidchemistry.chemical_compoundchemistryThin film
researchProduct